一种高精度旋转对位机构的设计

Design of a High-precision Rotary Alignment Mechanism

针对精密电子制造装备传统精密对位方式存在的不足,设计了一种高精度旋转对位机构。介绍了高精度旋转对位机构的结构和工作原理,对高精度旋转对位机构进行了行程测试、负载测试和精度测试,确认满足应用要求。

In view of the shortcoming of the traditional precision alignment mode of precision electronic manufacturing equipment,a high-precision rotary alignment mechanism was designed.The structure and working principle of the high-precision rotary alignment mechanism were introduced,and the stroke test,load test and accuracy test of the high-precision rotary alignment mechanism were carried out to confirm that the application requirement was met.