高硬度结构件绿色平面抛光工艺研究

Research on Green Plane Polishing Process for High-hardness Structural Part

针对精密气体静压转台高硬度结构件超精密加工需求,研究并提出一种高硬度结构件绿色平面抛光工艺。采用单因素试验法,优化抛光液组分,当磨粒粒径为3μm,磨粒浓度质量分数为20%时,抛光工件的表面质量最优。采用正交试验设计,分析各工艺参数对加工表面质量的影响规律,进而获得最优因素水平组合。

In order to meet the needs of ultra-precision machining of high-hardness structural part of precision hydrostatic turntable,a green plane polishing process for high-hardness structural part was studied and proposed.The single factor test method was used to optimize the composition of the polishing slurry,and when the abrasive particle size was 3μm and the abrasive concentration is 20%,the surface quality of the polished workpiece is the best.The orthogonal experimental design was used to analyze the influence of each process parameter on the quality of the machined surface,and then the optimal combination of factors was obtained.