基于液态金属磁流变弹性体的柔性触觉传感器

Flexible tactile sensor based on liquid metal magnetorheological elastomer

柔性触觉传感器是可穿戴设备和机器触觉系统的重要组成部分,通过向磁流变弹性体(MRE)填充液态金属EGaIn,制备了一种压阻材料液态金属填充磁流变弹性体(LMMRE),并利用此材料设计了一种柔性触觉传感器。本文介绍了针对传感器电极层进行的电极工艺探索,提出了一种一体固化式电极工艺。研究表明,基于一体固化式电极工艺的触觉传感器制备工艺简单,成本低且具备较高的灵敏性和较小的迟滞误差。由于填充底料EGaIn的熔点为15.5℃,低温下EGaIn刚度的改变会影响压阻特性,本文探究了温度变化对传感器性能的影响,为传感器结构化和温度补偿设计提供实验数据。

Flexible tactile sensor is an important component of wearable devices and machine haptic systems.A piezoresistive material,liquid metal-filled magneto-rheological elastomer(LMMRE)is prepared by filling magneto-rheological elastomer(MRE)with liquid metal Eutectic(EGaIn),and a flexible tactile sensor is designed using this material.The exploration of the electrode process for sensor electrode layer is introduced and a one-piece curing electrode process is proposes.The research shows that the preparation proeess of tactile sensor based on one-piece curing electrode process is simple,low cost and has high sensitivity and small hysteresis error.Since the melting point of the filled substrate material EGaIn is 15.5℃,the change of EGaIn stiffness at low temperature will affect the piezoresistive characteristics.Effect of temperature change on sensor performance is investigated,which provides experimental data for sensor structuring and temperature compensation design.