材料微形态与微图案加工及可视化应用

Research of Material Micro-morphology and Micro-pattern Processing and Visualization Application

近年来微纳技术革新层出不穷,对材料微纳尺度下的形态结构进行设计与加工的精度和稳定性得到了大幅提升。在此基础上能够实现材料形态的微观可视化,这在半导体与微电子、仿生表面构筑等领域应用前景广阔。本文从纳米材料发展过程及具体分类出发,探讨其微观可视化的相关技术,并阐述了以飞秒激光为主的热点微纳加工制造方法,分析不同加工方法带来的不同材料特性差异,以及典型功能化应用。同时,藉由微形态、微图案等微观可视化的视觉艺术设计与创作内涵,开展微观艺术审美解析与探讨。

In recent years,the innovation of micro-nano technology has emerged in an endless stream,and the accuracy and stability of the design and processing of the morphological structure of materials at the micro-nano scale have also been greatly improved.On this basis,the micro-visualization of material morphology can be realized,which has broad application prospects in the fields of semiconductor and microelectronics,bionic surface construction and so on.Based on the development process and specific classification of nanomaterials,this paper discusses the related technologies of microscopic visualization,and expounds the hot micro-nano processing and manufacturing methods based on femtosecond laser,and analyzes the different material characteristics brought by different processing methods,as well as typical functional applications.At the same time,through the visual art design and creative connotation of micro-visualization such as micro-form and micro-pattern,the micro-art aesthetic analysis and discussion are carried out.