超声横振辅助微细电解加工关键技术研究

Research on Key Technology of Ultrasonic Transverse Vibration Assisted Electrochemical Micromachining

针对深窄槽微细电解加工中存在电解产物排出困难的问题,提出了一种超声横振辅助微细电解加工方法。该方法利用工具电极产生横振使加工间隙的流场产生周期性变化,增强了电解加工间隙内电解产物传质能力,提高了深窄槽微细电解加工效率及加工稳定性。为研究该工艺的加工特性,研制了一套超声横振辅助微细电解加工装置,其关键技术是实现3种工作模式的超声-电解同步电源。基于研制的超声横振辅助微细电解加工装置,本文以深窄槽加工实验为研究对象,探究了电源的不同工作模式对深窄槽的影响规律。实验结果表明超声横振有利于提高深窄槽加工的传质能力,同步超声模式1有利于进一步提高工件的溶解量和微细电解加工的传质能力,同步超声模式2则有利于提高深窄槽的加工精度。最后,加工出槽宽为432.9μm,深宽比为11.9的深窄槽。

Aiming at the problem that the electrolytic product is difficult to dispersed in electrochemical micromachining of deep and narrow grooves,a method of ultrasonic transverse vibration assisted electrochemical micromachining is proposed.This method uses the tool electrode to generate transverse vibration to make the flow field of the machining gap change periodically,which enhances the mass transport ability of the electrolytic products in the machining gap,and improves the machining efficiency and machining stability of the deep and narrow grooves.In order to study the processing characteristics of the method,a set of ultrasonic transverse vibration assisted electrochemical micromachining equipment is developed.The key equipment is ultrasonic-electrolysis synchronizing supply,which can achieve three operational modes.Based on the developed equipment,machining experiments are conducted on deep and narrow grooves as the research subject.The influence of different operational modes of the supply on the deep and narrow grooves is studied.The experiment results show that ultrasonic transverse vibration is beneficial to enhance the mass transport ability of deep and narrow groove machining.Synchronous ultrasonic mode one is beneficial to further improve the dissolution of workpiece and the mass transport ability of electrochemical micromachining.Synchronous ultrasonic mode two is beneficial to improve the machining accuracy of deep and narrow grooves.Finally,a deep and narrow groove with a width of 432.9μm and an aspect ratio of 11.9 is processed.