摘要
High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths,high efficiencies,and flexibilities for high-volume chip-scale fabrication.Recently,we designed a home-developed chalcogenide glass(ChG)-Ge_(25)Sb_(10)S_(65)(GeSbS)for optical information processing chips and systems,which featured an ultrabroad transmission window,a high Kerr nonlinearity and photoelastic coefficient,and compatibility with the photonic hybrid integration technology of silicon photonics.Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process.Moreover,considering the high Kerr nonlinearity and photoelastic effect of ChGs,we realised a novel ChG hybrid integrated chip,inspired by recent advances in integrated soliton microcombs and acousto-optic(AO)modulators.
基金
supported by the National Key R&D Program of China under Grant(2019YFA0706301)
the Key Project in Broadband Communication and New Network of the Ministry of Science and Technology(MOST)(2018YFB1801003)
the National Science Foundation of China(NSFC)(U2001601,61975242,61525502,62175095,62375292)
the Natural Science Foundation of Guangdong Province for Distinguished Young Scholars(2023B1515020028).
