基于微透镜阵列的蓝光匀化系统设计及实验研究

Design and experimental research of blue light homogenization system based on microlens array

为了提高蓝光半导体激光器光束的均匀性,采用傅里叶光学理论建立匀光系统数学模型并进行理论分析,运用相关软件对匀光系统进行仿真模拟,搭建了一套基于微透镜阵列的蓝光匀光系统,利用该系统得到光斑均匀性为87.6%的匀化光斑。结果表明,匀化光斑的均匀性不仅与微透镜阵列子透镜的焦距和孔径相关,也与聚焦透镜的焦距相关,采用焦距为100 mm的菲涅耳透镜得到的匀化光斑均匀度要比焦距为80 mm的菲涅耳透镜得到的匀化光斑均匀度高约9.2%。该研究为具有较高集成度和较轻体积的蓝光光束匀光系统提供了理论和设计思路。

In order to improve the uniformity of the blue light semiconductor laser beam,a mathematical model of the uniform light system was established using Fourier optics theory,and theoretical analysis was conducted.The uniform light system was simulated using software,and a blue light uniform light system based on a microlens array was built.By using this system,a uniform light spot with a uniformity of 87.6%was obtained.The experimental results show that the uniformity of the homogenized spot is not only related to the focal length and aperture of the microlens array sublens,but also to the focal length of the focusing lens.The uniformity of the homogenized light spot obtained by using a Fresnel lens with a focal length of 100 mm is about 9.2%higher than that obtained by a Fresnel lens with a focal length of 80 mm.This study provides theoretical and design ideas for a blue light beam uniform system with high integration and light volume.