N_(2)流量对CrAlYN涂层结构、力学及热稳定性的影响研究

Effect of N_(2) Flow Rate on the Structure,Mechanics and Thermal Stability of CrAlYN Coating

N_(2)流量对CrAlYN涂层的结构和性能影响较大,因此,本文系统研究了N_(2)流量对CrAlYN涂层结构、力学及热稳定性的影响。结果表明,当N_(2)流量从23 mL/min增大到38 mL/min时,涂层中氮原子含量从26.45 at.%增加到52.20 at.%。当N_(2)流量为33 mL/min时,涂层中氮含量为49.00 at.%,元素组成符合化学计量比,涂层具有最高的硬度和抗塑性变形能力。XRD和TEM等分析表明,低N_(2)流量下制备的涂层具有纳米晶结构,硬度较低。高N_(2)流量下制备的涂层呈现柱状晶结构,氮原子的注入效应使涂层张应力增大,硬度降低。在33 mL/min的N_(2)流量下制备的涂层晶粒较小,结构致密,硬度达到24.6 GPa,1000℃退火后涂层氧化轻微,硬度为18.4 GPa,高于其他N_(2)流量下制备的涂层,表明该CrAlYN涂层具有最好的综合性能。

The flow rate of N_(2) had a significant impact on the structure and performance of CrAlYN coatings,so this study systematically investigated the influence of N_(2) flow rate on the structure,mechanical properties,and thermal stability of CrAlYN coatings.The results show that as the N_(2) flow rate increases from 23 mL/min to 38 mL/min,the nitrogen content in the coating increases from 26.45 at.%to 52.20 at.%.When the N_(2) flow rate is 33 mL/min,the nitrogen content in the coating is 49.00 at.%,and the elemental composition conforms to the stoichiometric ratio.The coating has the highest hardness and resistance to plastic deformation.XRD and TEM analyses show that coatings with low N_(2) flow rate has a nanocrystalline structure and lower hardness.The coatings with high N_(2) flow rate has a columnar crystal structure,and the injection of nitrogen atoms increases the compressive stress of the coating and reduces its hardness.The coating with a N_(2) flow rate of 33 mL/min has smaller grains and a dense structure,with a hardness of 24.6 GPa.After annealing at 1000°C,the coating shows slight oxidation and a hardness of 18.4 GPa,which is higher than that of coatings with other N_(2) flow rates,indicating that this CrAlYN coating has the best overall performance.