超声膨胀纳米团簇束流沉积SnO2薄膜的氢敏性能研究

Hydrogen sensing properties of supersonic expansion cluster beam deposited SnO_(2) films

氢能源发展如火如荼,氢燃料电池、高压储氢等技术蓬勃发展,但氢气传感器发展却相对落后,主要原因是现有制备手段难以获得兼具小晶粒尺寸和高疏松度的敏感薄膜。论文采用超声膨胀团簇束沉积技术制备了高度疏松的氧化锡薄膜,并研究了退火温度对其表面形貌、结晶度、晶粒尺寸以及化学组分的影响。结果表明,未退火样品氧含量低对氢气没有响应。250℃退火样品为非晶薄膜且保持了较高的疏松度,因此对氢气响应最快且幅值最高,但电阻过高难以实用。500℃退火样品表面吸附氧物种过多导致氢敏性能较差。750℃退火样品具有最佳的综合性能,且在高湿度下氢敏性能可进一步提升,因此,特别适合在氢燃料电池汽车中作为氢气安全传感器使用。

The development of hydrogen energy is in full swing,and technologies such as hydrogen fuel cells and high-pressure hydrogen storage are booming,However,the development of hydrogen sensors is relatively lagging behind.The main reason is that it is difficult to obtain sensitive films with both small grain size and high porosity using existing preparation methods.This paper uses supersonic expansion cluster beam deposition technology to prepare highly porous tin oxide films,and studies the effect of annealing temperature on its surface morphology,crystallinity,grain size and chemical composition.The results show that the as-deposited sample has low oxygen content and is unresponsive to hydrogen.The 25℃ annealed sample is an amorphous film and maintains a high degree of porosity,so it responds fastest to hydrogen and has the highest magnitude of response,but the resistance is too high to be used in real applications.There are too many oxygen species adsorbed on the surface of the sample annealed at 500℃,resultingin poor hydrogen sensingperformance.The 750℃annealed samplehasthe best overall performance,and the hydrogen sensing performance can be further improved under high humidity,so it is particularly suitable for use as a hydrogen safety sensor in hydrogen fuel cell vehicles.