摘要
In this work,a simple fabrication method of germanium-based metasurfaces is proposed,where the deposited Al_(2)O_(3) layer with high selectivity is chosen as the hard mask and retained after the dry etching process.The simulation and experimental characterization results verify the feasibility of the fabrication method.The experimental study on the fabrication methods of germanium-based metasurfaces is very significant as the meta-atoms with a higher refractive index can achieve 0 to 2πtransmission phase variation with a smaller period under the same thickness-to-period ratio,which is consistent with the requirement of the period miniaturization in some cases.
作者
Dongzhi Shan
Jinsong Gao
Nianxi Xu
Naitao Song
Hongda Wei
Qiang Li
Yi Zhao
Hai Liu
Qiao Sun
Xiaonan Jiang
Chao Li
Zhiyu Zhang
单冬至;高劲松;徐念喜;宋乃涛;魏鸿达;李强;赵毅;刘海;孙侨;姜肖楠;李超;张志宇(Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Jilin Provincial Key Laboratory of Advanced Optoelectronic Equipment and Instrument Manufacturing Technology,Changchun 130033,China)
基金
supported by the National Natural Science Foundation of China(No.12204478).
