一种双L型梁电容式六维力传感器设计

Design of Double L-beam Capacitive Six-axis Force Sensor

为设计一款高性能电容式六维力传感器,结合T型梁和十字型双直梁的优点,构建了一种双L型结构弹性梁,传感器转换元件采用差动结构平行极板电容器以降低传感器的测量误差,以转换矩阵的条件数为目标函数,应用粒子群算法与有限元仿真相结合的方法对该传感器的结构参数进行优化设计,得到最优结构参数后进行仿真,结果显示该构型的电容式六维力传感器仿真精度为0.4258%。最后对该传感器进行加工与标定实验,结果显示该传感器的实验精度达到0.6376%。

To design a high performance capacitive six-axis force sensor,a double L-shaped elastic beam structure was constructed by combining the advantages of T-shaped beam and cross shaped double straight beam,the sensor conversion element adopted[KG*9]a differential structure parallel plate capacitor to reduce the measurement error of the sensor,the combination of particle swarm algorithm and finite element simulation,with the condition number of the transformation matrix as the objective function,was applied to optimize the structural parameters of the sensor,after obtaining the optimal structural parameters,simulation was conducted,and the results show that the simulation accuracy of the capacitive six-axis force sensor with this configuration was 0.4258%.Finally,processing and calibration experiments were conducted on the sensor,and the results show that the experimental accuracy of the sensor reached 0.6376%.