功率半导体芯片类项目中工艺管理对厂务系统成本的影响

The influence of process management on facility operate cost in Power Semiconductor

通过对功率半导体芯片类项目中暖通系统、纯水制备输配系统和高纯化学品输配系统需要关注的一些成本要素进行探讨,介绍了项目工艺团队在在项目设计需求提出和运营阶段针对不同系统需要关注的参考建议。

Some influence factors on the semiconductor chip facility,such as HVAC,ultra-pure water purification,and ultra-pure chemical distribution system cost-down are discussed in this paper.And the writer shares his opinion that the process engineer should concerned issues about these system during the project designing and operating period.