不同设备水汽含量检测比对分析

Comparative Analysis of Water Vapor Content Detection for Different Equipment

介绍了2023年国内9家检测机构对空封陶瓷封装内部水汽含量检测的比对情况。水汽含量检测是反馈电子元器件封装工艺的重要手段,依据GJB548C—2021《微电子器件试验方法和程序》中的方法,通过质谱原理得到以10^(-6)为单位的水汽含量值。近些年,国内检测机构所使用的水汽含量检测设备处于新旧型号的更新迭代中,通过此次的比对数据来识别不同设备对封装内部水汽含量接近检测极限值时的检测差异程度,了解设备的性能状态,以提高机构间检测数据的互认度。制定了检测比对的详细方案,比对结果具有指导性。

The comparison of water vapor content detection in air-sealed ceramic packaging by nine domestic testing institutions in 2023 is introduced.Water vapor content detection is an important means to feed back the packaging process of electronic components.According to the method in GJB548C—2021"Test Methods and Procedures for Microelectronic Devices",the water vapor content value in units of 10^(-6) is obtained through mass spectrometry principle.In recent years,the water vapor content detection equipments used by domestic testing institutions are in the updating iteration of new and old models.Through the comparison data,the detection difference degree of different equipments is identified when the water vapor content inside the packaging is close to the detection limit value,and the performance status of the equipment is understood,so as to improve the mutual recognition of detection data between institutions.A detailed program for detection and comparison is formulated,and the comparison results are instructive.