扫描电子显微镜用X射线能谱仪在定量分析中的应用

Application of scanning electron microscopy and X-ray energy spectrometer in quantitative analysis

扫描电子显微镜用X射线能谱仪分析是元素定量分析的重要手段。对X射线能谱仪定量分析的基本工作原理进行简述,并对X射线能谱仪的定量分析方式、提高定量分析结果准确性的方法,以及定量分析中常见的问题进行了探讨,为进一步提高能谱仪定量分析的准确性提供了一定的参考。

Scanning electron microscopy and X-ray energy spectrometer analysis were important methods for quantitative analysis of elements.The basic working principle of quantitative analysis of X-ray energy spectrometer was briefly described,and discussed the quantitative analysis methods of X-ray energy spectrometer,methods to improve the accuracy of quantitative analysis results,and common problems in quantitative analysis.It provided a certain reference for further improving the accuracy of quantitative analysis of energy spectrometer.