气囊抛光蓝宝石弧面研究分析

Study and Analysis of Bonnet Polished Cambered Surface of Sapphire

随着国防军工和LED产业发展,对蓝宝石衬底的需求和形状复杂度的要求逐步提升。蓝宝石传统抛光方式如化学机械抛光存在效率低、曲面加工效果不佳等问题,而气囊抛光作为快速抛光方式之一,适用于各种曲面的抛光,故将气囊抛光技术应用于蓝宝石弧面抛光。首先基于机器人平台建立抛光运动模型,随后通过单因素试验和正交试验得到较优工艺参数,最后在较优工艺参数下进行整弧面抛光并探究抛光时间对蓝宝石表面质量的影响。结果表明,抛光时间为8 min时,工件弧面表面粗糙度Ra从541.5 nm下降至41.2 nm并成功保形,验证了气囊抛光蓝宝石弧面的工艺可行性。

With the development of national defense military and LED industry,the demand for sapphire substrates and the complexity of their shapes is increasing.Traditional polishing methods such as chemical mechanical polishing has the deficiencies of low efficiency and poor cambered-surface processing effect,while bonnet polishing,as one of the rapid polishing methods,is applicable to a variety of cambered surface polishing.Therefore,the bonnet polishing technology was applied to sapphire cambered-surface polishing.Firstly,the polishing motion model of sapphire was established on a robotic platform and the optimum processing parameters were obtained through single-factor test and orthogonal test.Then the polishing for the whole cambered surface was carried out under the optimum parameters and the effect of polishing time on the surface quality was investigated.The results show that the surface roughness Ra of the cambered surface reduces from 541.5 nm to 41.2 nm and the workpiece is conformal when the polishing time is 8 min,which verifies the feasibility of bonnet polishing for sapphire cambered surface.