QCM微粒传感器中的高压静电吸附结构设计与性能评估

Design and Performance Evaluation of High Voltage Electrostatic Adsorption Structure in QcM Particle Sensor

阐述微型PM颗粒物检测器的设计,提出基于石英晶体压电效应的检测方法。该方法采用QCM微粒检测技术,设计并研发微型颗粒物检测器电路控制芯片,建立多颗粒传感解耦模型,搭建QCM电路仿真实验系统,实现利用QCM传感器对空气PM值的检测。

This paper describes the design of a miniature PM particle detector and proposes a detection method based on the piezoelectric effect of quartz crystals.This method adopts QCM particle detection technology,designs and develops a micro particle detector circuit control chip,establishes a multi particle sensing decoupling model,builds a QCM circuit simulation experimental system,and realizes the detection of air PM values using QCM sensors.