摘要
微纳制造技术能够实现微纳米级别的高精密加工,是现代高科技制造领域的核心技术。提升微纳制造技术水平,有助于提高中国高端制造业的整体竞争力,对推动科技创新和促进产业升级具有积极意义。文章概述了微纳制造技术体系,着重分析了芯片微纳制造、激光微纳制造和聚合物微纳制造等典型微纳制造技术的发展态势,概述了多尺度精密微纳加工、多功能材料合成制造、高度集成和多功能化、自组装技术与结构、生物纳米技术融合制造、量子信息与纳米器件及绿色环保制造技术等发展趋势,针对性提出了深化基础研究、创新材料与工艺、强化人才培育与引进、加强产学研结合与技术转化等发展建议,以期促进我国中国微纳制造技术产业整体水平提升和高质量发展。
Micro-nano manufacturing technology can achieve high-precision processing at the micro-nano level and is the core technology in the field of modern high-tech manufacturing.Improving the level of micro-nano manufacturing technology will help enhance the overall competitiveness of high-end manufacturing in China and have a positive significance for promoting technological innovation and industrial upgrading.In this paper,the micro-nano manufacturing technology system was introduced,and the development of several typical micro-nano manufacturing technologies such as chip micro-nano manufacturing,laser micro-nano manufacturing,and polymer micro-nano manufacturing was analyzed in detail.In addition,the development trends of multi-scale precision micro-nano processing technology,multifunctional material synthesis and manufacturing,high integration and multifunctionality,self-assembly technology and structure,bio-nanotechnology fusion manufacturing,quantum information and nanodevices,and green and environmentally friendly manufacturing technology were summarized.Targeted development suggestions were put forward,including deepening basic research,innovating materials and processes,strengthening talent training and introduction,and enhancing the integration of industry,academia,and research and technology transformation,so as to promote the overall level and high-quality development of the micro-nano manufacturing in China.
作者
林启敬
张福政
赵立波
LIN Qijing;ZHANG Fuzheng;ZHAO Libo(State Key Laboratory for Manufacturing System Engineering,Xi’an 710054,China;School of Instrument Science and Technology,Xi’an Jiaotong University,Xi’an 710049,China)
出处
《前瞻科技》
2024年第3期7-18,共12页
Science and Technology Foresight
基金
国家重点研发计划(2021YFB3201800)。
关键词
微纳制造
精密加工
光刻技术
微/纳机电系统
纳米材料
micro-nano manufacturing
precision machining
lithography technology
micro/nano electromechanical system
nanomaterials