基于石英晶体薄膜的压力传感器研究

Research on torr pressure sensor based on quartz crystal thin film

基于石英晶体薄膜,进行了直接键合、Au-Au键合、共晶焊和玻璃浆料封接,包括石英晶体—石英晶体、石英晶体—609金属双层封接、石英晶体三层封接、石英晶体—609金属多层封接。封接漏率低于1×10^(-13)Pa·m^(3)/s,强度达到了10MPa,翘曲降到了3μm。采用石英晶体作为敏感元件,利用MEMS加工工艺制备出带有电极图形石英,通过转接的方式,将石英晶体薄膜封接到609金属上制成电容压力传感器,测试了不同封接工艺零位漂移,实现了0.001~0.1 mmHg低真空度的测量范围,测量范围内精度±0.6%。15天长期零位漂移为0.8μmHg,漂移水平为0.5%FS。通过在石英晶体上设计“弓”型应力释放结构,采用上述相同工艺制备了电容压力传感器,15天长期零位漂移水平降至0.06%FS。

Based on quartz crystal thin film,direct bonding,Au-Au bonding,eutectic welding,and glass slurry sealing are carried out,including quartz crystal-quartz crystal,quartz crystal—609 metal double-layer sealing,quartz crystal three-layer sealing,and quartz crystal—609 metal multi-layers sealing.The sealing leakage rate is less than 1×10^(-13) Pa·m^(3)/s,the strength reaches 10 MPa,and the warping is reduced to 3μm.Using quartz crystal as sensitive element and using MEMS processing technology to prepare quartz with electrode patterns,capacitive pressure sensor is made by sealing the quartz crystal film onto 609 metal through transfer.Zero drift of different sealing processes is tested,achieving a low vacuum measurement range of 0.001~0.1 mmHg with an accuracy of±0.6%within the measurement range.The long-term zero drift for 15 days is 0.8μmHg,with a drift level of 0.5%FS.By designing a"bow"shaped stress release structure on quartz crystals and using the same process mentioned above,capacitive pressure sensor is prepared,with a long-term zero drift level reduced to 0.06%FS after 15 days.