钛合金表面沟槽结构纳秒激光加工实验研究

Experimental study on nanosecond laser processing of surface groove structure of titanium alloy

为了在钛合金表面加工高质量的微小结构,探究不同因素对表面质量的影响规律,利用纳秒激光开展钛合金Ti6Al4V加工实验研究。通过3维显微镜和共聚焦显微镜测量了不同参数下的钛合金工件加工表面形貌,利用正交实验和单因素分析法探究扫描速率、激光功率、扫描线间距对加工形貌和粗糙度值的影响规律。结果表明,在低功率、高速率、大线间距条件下,材料去除不连续,加工表面呈现间断的凹坑结构;随着功率的增加、加工速率的降低和线间距的减小,材料去除逐渐连续,加工后材料表面质量得到明显改善;选择激光功率24 W、扫描速率2000 mm/s、线间距0.01 mm的参数在钛合金表面成功加工出宽度500μm、深度140μm的阵列微沟槽结构。该研究对激光加工钛合金表面微小结构具有较好的实用价值。

In order to process high-quality microstructures on the surface of titanium alloys and to investigate the influence of different factors on the surface quality,the nanosecond laser was used in the experimental research on the processing of titanium alloy Ti6Al4V.The surface morphology of titanium alloy workpieces processed under different parameters was measured by three-dimensional microscope and confocal microscope.Further,orthogonal experiments and one-way analysis of factors were used to investigate the effects of scanning speed,laser power and scanning line spacing on the processing morphology and roughness values.The results show that under the conditions of low power,high speed,and large line spacing,the material removal is discontinuous and the processed surface shows intermittent pit structure;with the increase of power,the decrease of processing speed and the reduction of line spacing,the material removal is gradually continuous and the processed surface quality is improved.The parameters of laser power 24 W,scanning speed 2000 mm/s,and line spacing 0.01 mm were selected to successfully process the array microgroove structure with a width of 500μm and a depth of 140μm on the surface of titanium alloy.This study has good practical value for laser processing of the surface microstructure of titanium alloys.