掩模辅助激光切割PDMS的工艺实验研究

Experimental investigation on mask assisted laser cutting of PDMS

为了提高紫外纳秒固体激光切割聚二甲基硅氧烷(PDMS)的加工质量,提出了一种掩模辅助激光切割PDMS的方法。采用聚酰亚胺薄膜作为掩模材料,进行了无掩模及不同厚度掩模下紫外纳秒固体激光切割PDMS实验,分析了PDMS材料表面微裂纹的形成机理,获得了激光主要工艺参数对微槽的槽深、槽宽及加工质量的影响规律。结果表明,掩模条件下激光切割PDMS的表面加工质量较好,无微裂纹产生且玻璃态转化较少;槽深和槽宽均随激光脉冲能量、扫描速率的增加而增大;掩模厚度为15μm和50μm、扫描速率为40μm/s和50μm/s、脉冲能量高于0.40 mJ时,微槽表面热影响区较小。本研究为提高紫外纳秒固体激光切割PDMS的加工质量提供了一种方法。

In order to improve the processing quality of ultraviolet(UV)nanosecond solid-state laser cutting polydimethylsiloxane(PDMS),a new method of mask-assisted laser cutting PDMS was proposed in this paper.Using polyimide film as the mask material,the process experiments of cutting PDMS with UV nanosecond solid-state laser without mask and with different thickness masks were carried out.The formation mechanism of microcracks on the surface of PDMS material was analyzed,and the influence of main laser process parameters on the groove depth,groove width,and processing quality of microgrooves was obtained.The results show that the surface quality of laser cutting PDMS under mask condition is good,no microcrack is generated and the glass transition is less.The groove depth and width increase with the increase of laser pulse energy and scanning speed.When the mask thickness is 15μm and 50μm,the scanning speed is 40μm/s and 50μm/s,and the pulse energy is higher than 0.40 mJ,respectively,and the heat-affected zone of the microgroove surface is small.This study provides a new method for improving the processing quality of UV nanosecond solid-state laser cutting PDMS.