动能歧视碰撞-电感耦合等离子体质谱法测定高纯石英砂中16种元素

Determination of sixteen elements in high-purity quartz by kinetic energy discrimination collision-inductively coupled plasma-mass spectrometry

采用动能歧视碰撞模式消除多原子离子干扰,以干扰方程扣除Sr对Ca的双电荷干扰,建立一种用单四级杆电感耦合等离子体质谱仪同时测定Al、Ca、Cr、Cu、Fe、Ge、K、Li、Mg、Mn、Na、Ni、P、Sr、Ti、Zn 16种杂质元素含量的方法,检出限为0.001~0.1μg/g,样品回收率为92%~110%。将其应用于高纯石英标准物质测定,结果的相对误差(RE)为-29.03%~10.77%,相对标准偏差(RSD)不大于6.0%(n=10)(仅考察给出认定值的元素)。方法用于4N8纯度高纯石英砂中杂质含量的测定,结果满意。

Through taking a kinetic energy discrimination collision mode to eliminate the interference of multiple atomic ions and deducing the double charge interference of Sr on Ca from the interference equation,a method using a single quadrupole inductively coupled plasma mass spectrometer is established to simultaneously determine the content of 16 kinds of impurity elements,including aluminum,calcium,chromium,copper,iron,germanium,potassium,lithium,magnesium,manganese,sodium,nickel,phosphorus,strontium,titanium,and zinc.The detection limit ranges from 0.001μg·g^(-1)to 0.1μg·g^(-1),and the sample recovery rate ranges from 92%to 110%.As this method is applied to determine standard substances in high-purity quartz,the result delivers a relative error(RE)in the range of-29.03%-10.77%and a relative standard deviation(RSD)of no more than 6.0%(n=10)when only examining the elements that provide a recognized value.Satisfactory results are obtained when the method is used to determine the impurity content in quartz sand with a purity of 4N8.