用于海洋三维温度场监测的MEMS温压一体式传感器

Integrated MEMS Temperature and Pressure Sensor for Monitoring of Marine Three-Dimensional Temperature Field

海水温度和深度信息的采集在水文、气象、渔业、生态保护等领域具有重要意义。基于微机电系统(MEMS)技术研制了一种用于海水温度及深度检测的温压一体式传感器。该传感器采用双面设计,利用薄膜式铂电阻传感单元和压阻式压力传感单元分别检测温度和深度信息。两种传感单元均可通过MEMS工艺进行制作,且制作工艺互相兼容,因此,该传感器具有尺寸小、易于大批量制造、可与CMOS集成等优点。经对该传感器性能进行测试,温度传感单元在0~40℃范围内的电阻温度系数为0.27%/℃,测量精度为±0.04℃,同一批次样品电阻温度系数标准偏差为±0.0049%/℃;压力传感单元的量程为0~10 MPa,在该量程范围内其有良好的线性度(R^(2)=0.9993)、灵敏度(14.14 mV/MPa)和批量一致性(灵敏度的标准偏差为±0.896 mV/MPa)。此外,利用温度传感单元信号对压力传感单元在不同温度下的输出电压进行温度-压力解耦,解耦后压力传感单元在5~35℃温度范围内的最大相对误差由8.42%降低至1.07%。开发的MEMS温压一体式传感器满足了海水温度和深度检测的性能需求,有望解决海洋三维温度场监测的难题,在海洋环境保护和水文信息采集等领域有着广泛的应用前景。

The acquisition of temperature and depth of seawater is of great significance in the fields of hydrology,meteorology,fisheries,ecological protection and so on.Based on microelectromechanical system(MEMS)technology,an integrated temperature and pressure sensor for seawater temperature and depth detection was developed.A double-sided design was used in the sensor with a thin-film platinum resistance sensing unit and a piezoresistive pressure sensing unit for temperature detection and depth detection respectively.The two sensing units were fabricated by MEMS fabrication process.And the production process is compatible with each other,so the sensor has the advantages of small size,easy mass manufacturing and integration with CMOS.Through the performance tests of the sensor,the resistance temperature coefficient of the temperature sensing unit in the range of 0-40℃is 0.27%/℃with a measurement accuracy of±0.04℃,and the standard deviation of the resistance temperature coefficient of the same batch of samples is±0.0049%/℃;the measuring range of the pressure sensing unit is 0-10 MPa,the pressure sensing unit has good linearity(R^(2)=0.9993),sensitivity(14.14 mV/MPa)and batch consistency(standard deviation of sensitivity of±0.896 mV/MPa)in the range.In addition,the output voltage of the pressure sensing unit at different temperatures is decoupled from temperature to pressure by the signal of the temperature sensing unit.Therefore,the maximum relative error of the pressure sensing unit in the temperature range of 5-35℃can be reduced from 8.42%to 1.07%after decoupling.In conclusion,the developed MEMS temperature and pressure integrated sensor can meet the performance requirements of seawater temperature and depth sensing,is expected to solve the problems of marine three-dimensional temperature field monitoring,and has a wide application prospect in the fields of marine environmental protection and hydrological information collection.