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用于TDLAS的半导体激光器温度控制系统设计

Design of semiconductor laser temperature control system for TDLAS
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摘要 由于TDLAS(可调谐激光吸收光谱)技术中半导体激光器工作温度直接影响气体浓度检测准确度。为实现气体浓度高精密检测,采用多级积分分离PID控制算法设计了一种用于TDLAS的半导体激光器温度控制系统。实验结果表明,多级积分分离PID控制算法在提高温度控制系统响应速度、提高系统精度和稳定性、减小超调等方面具有优势。温度控制系统在10℃~40℃温控范围内,温控精度优于±0.03℃,并在148 s内达到设定温度,温控超调量小于2.5%,设计满足TDLAS气体浓度检测要求,为实现气体浓度高精密检测奠定了基础。 The working temperature of semiconductor laser in TDLAS(tunable laser absorption spectroscopy)technology directly affects the accuracy of gas concentration detection.The experimental results show that the multilevel integral separation PID control algorithm has advantages in improving the response speed of the temperature control system,improving the accuracy and stability of the system,and reducing the overshoot.The temperature control system has a temperature control accuracy of better than±0.03℃in the temperature control range of 10~40℃,and reaches the set temperature within 148 s.The temperature control overshoot is less than 2.5%.The design meets the requirements of TDLAS gas concentration detection and lays a foundation for high-precision detection of gas concentration.
作者 王泽元 魏志鹏 孙礼朋 WANG Zeyuan;WEI Zhipeng;SUN Lipeng(State Key Laboratory of High Power Semiconductor Laser of Changchun University of Science and Technology,Changchun 130022,China;Zhongshan Institute of Changchun University of Science and Technology,Zhongshan Guangdong 528437,China;He Guang Jing Dian Chongqing Technology Company Limited,Chongqing 400044,China)
出处 《激光杂志》 CAS 北大核心 2024年第9期8-13,共6页 Laser Journal
基金 国家自然科学基金(No.12074045、No.62027820) 吉林省科技厅自然科学基金项目(No.20210101408JC、No.20230101352JC)。
关键词 TDLAS 半导体激光器 温度控制 多级积分分离PID TDLAS semiconductor laser temperature control multilevel integral separation PID
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