膜法分离N_(2)/SF_(6)气体研究进展

Research Progress on Membrane Separation of N_(2)/SF_(6)Gas

六氟化硫(SF_(6))气体广泛应用于高压输配电系统、半导体和等离子蚀刻工艺等领域。与受到广泛关注的最常见温室气体二氧化碳相比,SF_(6)具有更高的全球增温潜能值和更长的大气寿命。传统的从N_(2)/SF_(6)混合气体中捕获和回收SF_(6)方法(如蒸馏和液化)成本高昂,而膜法分离N_(2)/SF_(6)混合气体得到SF_(6)具有较低能耗而被广泛研究。本文简要介绍膜法分离N_(2)/SF_(6)混合气体技术的现状,以及此类分离工艺所面临的技术挑战。

Sulfur hexafluoride(SF_(6))gas is widely used in high-voltage power transmission and distribution systems,semiconductors and plasma etching processes.Compared to carbon dioxide,the most common greenhouse gas of widespread concern,SF_(6)has a higher global warming potential and a longer atmospheric lifetime.Traditional methods of capturing and recovering SF_(6)from N_(2)/SF_(6)mixtures,such as distillation and liquefaction,are costly,while membrane separation of N_(2)/SF_(6)mixtures to obtain SF_(6)has been widely studied due to its lower energy consumption.This article briefly introduces the current status of membrane separation of N_(2)/SF_(6)mixtures and the technical challenges faced by such separation processes.