沉积压力对石墨共溅射沉积(AlTiVCrNb)CxNy涂层结构及摩擦学性能的影响

Effect of Deposition Pressure on Microstructure and Tribological Properties of(AlTiVCrNb)CxNy Coatings Deposited by Graphite Co-sputtering

目的研究不同沉积压力对磁控溅射(AlTiVCrNb)CxNy涂层微观结构及摩擦学性能的影响。方法采用非平衡射频磁控溅射法制备(AlTiVCrNb)CxNy涂层,利用相关设备分析涂层成分、形貌、晶向结构及各元素的化学形态,进一步采用纳米压痕仪、往复滑动摩擦磨损试验机和白光干涉形貌仪,对涂层的硬度、弹性模量和摩擦磨损性能进行表征。结果随着沉积压力的增大,(AlTiVCrNb)CxNy涂层表面形貌由分散柱状转变为花朵形柱状聚集,涂层截面形貌间隙度呈现先降低、后升高的趋势。在沉积压力为0.4 Pa时,涂层的致密性达到最优。(AlTiVCrNb)CxNy涂层的硬度和弹性模量随着沉积压力的增大,因受涂层中碳sp3键相对含量变化的影响,呈现出先升高、后降低的趋势,硬度最大值为21.23 GPa。在沉积压力为0.4 Pa、载荷为5 N时,涂层在摩擦磨损过程中因sp2团簇在对磨球表面形成质量较良好碳转移膜,(AlTiVCrNb)CxNy涂层的平均摩擦因数及磨损率达到最低,分别为0.261和0.69×10^(-6)mm^(3)/(N·m)。结论沉积压力的变化对(AlTiVCrNb)CxNy涂层的微观结构、力学性能及摩擦学性能产生较大影响,通过石墨共溅射可以制备出结构组织优良、摩擦性能较优异的(AlTiVCrNb)CxNy涂层。

The work aims to study the effects of different deposition pressure on the microstructure and tribological properties of magnetron sputtering(AlTiVCrNb)CxNy coatings.The(AlTiVCrNb)CxNy coating was prepared by unbalanced RF magnetron sputtering.The composition,morphology,crystal orientation structure and chemical morphology of each element were analyzed by related equipment.The hardness,elastic modulus and friction and wear properties of the coating were further characterized by nanoindentation,reciprocating sliding friction and wear tester and white light interference topography.With the increase of deposition pressure,the surface morphology of(AlTiVCrNb)CxNy coating changed from dispersed columnar to flower-shaped columnar aggregation,and the gap of coating cross-section morphology decreases first and then increased.When the deposition pressure was 0.4 Pa,the compactness of the coating was optimal.The hardness and elastic modulus of the(AlTiVCrNb)CxNy coating increased firstly and then decreased with the increase of the deposition pressure due to the change of the relative content of the carbon sp3 bond in the coating.The maximum hardness was 21.23 GPa.When the deposition pressure was 0.4 Pa and the load was 5 N,the coating formed a good carbon transfer film on the surface of the grinding ball due to sp2 clusters during the friction and wear process.The average friction coefficient and wear rate of(AlTiVCrNb)CxNy coating were the lowest,which were 0.261 and 0.69×10^(-6)mm^(3)/(N·m),respectively.The change of deposition pressure has a great effect on the microstructure,mechanical properties and tribological properties of(AlTiVCrNb)CxNy coating,and(AlTiVCrNb)CxNy coating with excellent structure and friction properties can be prepared by graphite co-sputtering.