摘要
本文通过介绍纳米电磁力驱动传感器(NMAT)的结构组成和各部件的主要作用,以及其工作原理,对力值和位移的校准方法进行研究,并对测量结果进行分析。结果表明:单方向的力值校准结果可代表力值技术指标;F_(1)、E_(2)等级标准砝码和电容式测微仪满足相应参数的技术指标要求。该方法可为校准工作提供参考。
This paper introduces the structure and main function of each component of the nano-electromagnetic force driven sensor(NMAT),and its working principle.The calibration method of force value and displacement is studied,and the measurement results are analyzed.The results show that the calibration results of force value in one direction can represent the technical index of force value.F_(1),E_(2) grade standard weights and capacitive micrometer meet the technical requirements of the corresponding parameters.This method can provide reference for calibration work.
作者
彭睿
傅忆宾
孙涛
PENG Rui;FU Yibin;SUN Tao
出处
《计量与测试技术》
2024年第9期34-37,共4页
Metrology & Measurement Technique
基金
广州市NQI-质量安全科技协同创新中心(项目编号:2023B04J0407)。
