高速垂直腔面发射激光器热管理研究进展

Research Progress in Thermal Management of High-Speed Vertical Cavity Surface Emitting Lasers

垂直腔面发射激光器(VCSEL)与并行光传输、光互连等领域的数据传输需求相契合,能够应用于单通道和并行光互联网络,是宽带以太网、高速数据通信中关键的光电子器件。而热效应严重限制了VCSEL的带宽等高速调制性能并影响输出的稳定性,通过优化电流分布、调整氧化孔径、减薄衬底、使用高热导率的材料、键合热沉等方式有助于VCSEL的热耗散。本文综述了VCSEL热管理等方面的研究进展,这对于提升其高速调制性能至关重要,最后介绍了本课题组最新设计的具有高效散热结构的高速多孔孔径VCSEL。

Vertical cavity surface emitting lasers(VCSELs)meet the data transmission requirements in parallel optical transmission,optical interconnect,and other fields,and can be applied to single channel and parallel optical interconnection networks.It is also a key optoelectronic device in broadband Ethernet and high-speed data communication.The thermal effect severely limits the bandwidth and high-speed modulation performance of VCSEL,and affects the stability of the output.By optimizing current distribution,adjusting oxidation pore size,thinning the substrate,using materials with high thermal conductivity,and bonding heat sinks,the thermal dissipation of VCSEL can be facilitated.This article reviews the research progress in thermal management of VCSEL,which is crucial for improving its high-speed modulation performance.Finally,it introduces the latest research results within the authors’research group,which are high-speed multi-hole apertures VCSEL with efficient heat dissipation structure.