矢量涡旋光场在激光微纳加工中的应用

Applications of vector vortex beams in laser micro-/nanomachining

矢量光场领域在过去20年出现了众多重要进展。考虑到多篇综述介绍了矢量光场产生方法以及调控技术,作者仅以矢量涡旋光场为线索总结了其在激光减材、改性以及增材等微纳加工领域的典型应用,回顾了矢量涡旋光在材料表面和内部的微纳结构加工、光存储以及立体微结构光刻等应用中的部分关键进展。详细介绍了基于定制光场的图案化光致表面周期结构以及立体微结构快速双光子光刻的原理与技术。最后,总结了矢量涡旋光场在激光微纳加工中的优势与挑战,展望了其在未来将赋能更多复杂应用。

In the past two decades,numerous significant advances have been achieved in the realm of the vector beams.Considering numerous published reviews already covering diverse topics in terms of generating and/or manipulating unprecedented vector beams,we summarize the typical applications of vector vortex beams in the topics of laser micro-nano processing for material modification,subtractive and additive manufactures.This paper reviews part of the critical advances in fabricating micro-nano structures on the surface and inside the materials,optical information storage and rapid fabrication of microstructures with the stereolithography based-on vector vortex beams.Particular cares are focused on the principles and technologies in applications of patterned laserinduced periodic surface structures and rapid two-photon polymerization of three-dimensional microstructures based on customized vector vortex beams.Finally,we summarize the advantages and challenges of vector vortex beams in laser micro-nano processing,and we also anticipate that more vector light fields will enable more complex applications in the future.