接触式与白光干涉测头复合测量坐标统一与数据融合

Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

针对复合测量中两测头空间坐标系不统一的问题,提出了基于标定器提供基准点结合单位四元数法求解空间变换矩阵的坐标统一方法,并以均方根误差(RMSE)来评估坐标统一的效果。设计并制作了一种新型标定器,为坐标统一提供稳定可靠的基准点,并建立了基准点精度与坐标统一精度的关系模型。针对两测头测量数据,提出了空间误差椭球搜索策略结合加权最小二乘法的数据融合方法。实验结果表明,复合测量的坐标统一化配准精度可达1.889μm,所提出的数据融合方法相较传统加权最小二乘法的相对误差减小了16%,重复性精度提高了38%,实现了复合测量的高精度坐标统一与稳定精确的数据融合,提升了对器件的测量能力。

To achieve high-precision measurements of these components,micro/nano contact probes and white light interferometric probes must be combined for composite measurement.This paper presents a method to unify the spatial coordinate systems of the two probes using calibration points from a custom cali⁃brator and the unit quaternion method to derive the spatial transformation matrix,evaluated by root mean square error(RMSE).A novel calibrator was designed to offer stable reference points,with a model link⁃ing their accuracy to coordinate unification precision.Additionally,a data fusion method blending spatial er⁃ror ellipsoid search with weighted least squares was proposed,demonstrating a registration accuracy of 1.889μm.This method decreased the relative error by 16%and improved repeatability precision by 38%compared to traditional least squares.The research enhanced the measurement precision and data fusion stability of composite measurement systems.