加热器ITO膜层图案刻蚀对改变热量分布的研究

Research on the Change of Heat Distribution by Heater ITO Film Pattern Etching

为了控制加热器的加热均匀性,改变加热器表面的热量分布,提出一种基于ITO膜层图案刻蚀的加热器设计与加工方法。首先结合理论计算设计初步图案,用图案刻蚀的方法加工样品进行测试,找到ITO膜层图案刻蚀与热量分布的规律;然后结合具体项目设计一种可以满足产品要求的ITO膜层图案,制作加热器样品并测试热量分布;最后将相关数据进行整理与总结,为ITO膜层图案设计及加热器制作提供一种可行性方案。

In order to control the heating uniformity of the heater and change the heat distribution of the heater surface,a design and processing method of the heater based on ITO film pattern etching was proposed.First of all,the preliminary pattern was designed by theoretical calculation,and the sample was processed by pattern etching method for testing,and the law of pattern etching and heat distribution of ITO film was found.Then an ITO film pattern was designed that could meet the product requirements according to the specific project,a heater sample was made and the heat distribution was tested.Finally,the relevant data were sorted and summarized to provide a feasible scheme for ITO film layer pattern design and heater production.