Tape-casting electrode architecture permits low-temperature manufacturing of all-solid-state thin-film microbatteries

Along with the constantly evolving functional microsystems toward more diversification,the more rigorous design deliberation of pursuing higher mass-loading of electrode materials and low-temperature fabrication compatibility have imposed unprecedented demand on integrable all-solid-state thin-film microbatteries.While the classic thin-film intercalation cathode prepared by vacuum-based techniques inevitably encountered a post-annealing process,tape-casting technologies hold great merits both in terms of high-mass loading and low-temperature processing.In this work,a novel microbattery configura-tion is developed by the combination of traditional tape-casting thick electrodes and sputtered inorganic thin-film solid electrolytes(~3μm lithium phosphorus oxynitride).Enabled by physically pressed or vapor-deposited Li as an anode,solid-state batteries with tape-casted LiFePO_(4) electrodes exhibit outstanding cyclability and stability.To meet integration requirements,LiFePO4/LiPON/Si microbatteries were successfully fabricated at low temperatures and found to achieve a wide operating temperature range.This novel configuration has good prospects in promoting the thin-film microbattery enabling a paradigm shift and satisfying diversified requirements.