摘要
MEMS陀螺是基于微机械电子技术(Micro-Electro-Mechanical System,MEMS)开发的惯性传感器。得益于体积小、成本低等优点,MEMS陀螺被广泛应用于航空航天、工业控制、消费电子等领域。为了研究MEMS陀螺性能与控制方法之间的关系,首先介绍了MEMS陀螺的工作原理和主要性能参数,然后综合分析了MEMS陀螺发展的4个阶段:开环陀螺、力平衡陀螺、全角陀螺和频率调制陀螺,最终对MEMS陀螺未来技术发展趋势进行了总结。
MEMS gyroscopes are inertial sensors developed based on Micro-Electro-Mechanical System(MEMS)technology.Thanks to its small size and low cost,MEMS gyroscopes are widely used in fields such as aerospace,industrial control,consumer electronics.In order to study the relationship between the performance of MEMS gyroscopes and their control methods,this paper introduces the working principle and main performance parameters of MEMS gyroscopes firstly.Then,it analyzes the four phases of MEMS Gyroscopes′development:open loop gyroscope,force balance gyroscope,full angle gyroscope and frequency modulation gyroscope.At last,it summarizes the future technological development trends of MEMS gyroscopes.
作者
冯杨
白云鹤
陈旭辉
王艺典
王帅民
FENG Yang;BAI Yunhe;CHEN Xuhui;WANG Yidian;WANG Shuaimin(Equipment Department of People's Liberation Army Navy,Xi'an,Shaanxi Province,710054 China;AVIC Xi'an Flight Automatic Control Research Institute,Xi'an,Shaanxi Province,710065 China)
出处
《科技资讯》
2024年第19期211-214,共4页
Science & Technology Information
