柔性压力传感器的制备和电学特性实验研究

Preparation of flexible pressure sensor and electric property study

将科研成果“柔性压力传感器的制备、性能与机理研究”转化为材料专业的本科综合性实验。利用简易的刻蚀法制备电容式晶体管压力传感器,通过柔性聚对苯二甲酸乙二醇酯(PET)作为衬底、依次旋涂聚合物半导体、聚甲基丙烯酸甲酯绝缘层,使用掩膜版进行UVO表面刻蚀得到100~400纳米深度的沟道,填充一层半导体后蒸镀栅极。使用半导体测试仪进行电学性能表征,得到器件迁移率、开关比等参数,引入不同压强后测试器件的压力灵敏度等参数。实验结果表明,晶体管型压力传感器对压力有显著的响应。以制备压力传感器为主线,内容涉及有机晶体管的制备、简单图案化、压力传感工作原理和物理参数的掌握,可作为一个基础性和研究性兼具的光电综合性新实验。实验主要面向材料物理专业大三年级的学生,培养学生思考、分析问题、解决问题能力的同时促进知识的创新和拓展。

The scientific research achievement“Study on the Synthesis,electrical behavior and mechanism of flexible pressure sensor”was transformed into a comprehensive undergraduate experiment in materials major.This experiment designed a field-transistor based pressure senor using a simple etching method,with the flexible polyethylene terephthalate(PET)as the substrate,spinning-coated polymer semiconductor and polymethyl methacrylate insulating layer,UVO surface etching channels of 100-400 nm depth via a shadow mask,buffer layer and finally a gate electrode.A semiconducting analyzer was used to characterize the electronic properties of the device,to get the parameters of mobility and on/off ratios;to test the sensitivity and response time under the applied pressure.The results showed that the as-prepared sensor displayed good sensitivity to the applied pressures.This work focuses on the preparation and characterization of pressure sensor,containing the organic transistor fabrication,simple patterning,the working mechanism and related parameters,which could be a new basic and research-oriented material physics comprehensive experiment.This experiment is primarily designed for third-year students majoring in material physics.It aims to cultivate students’abilities in thinking,problem analysis,and problem-solving,while also promoting knowledge innovation and expansion.