无压烧结碳化硅超精密磨削工艺参数优化

Optimization of pressureless sintered silicon carbide ultra-precision grinding process parameters

【目的】为降低碳化硅陶瓷材料表面粗糙度值,以优化磨削工艺参数为目标设计正交磨削试验。【方法】首先结合回归模型方差分析砂轮转速、进给速度、工件转速3个因素对磨削加工质量的影响程度;然后绘制响应曲面图,通过响应曲面图确定各参数对表面粗糙度的影响。【结果】当无压烧结碳化硅陶瓷材料用脆性去除方式时,砂轮转速对其表面粗糙度影响最大,在一定范围内砂轮转速越大,表面粗糙度值越小;求解得到最佳磨削参数组合为砂轮转速42000 r/min、进给速度1 mm/min、工件转速100 r/min,在此工艺参数下获得碳化硅陶瓷的表面粗糙度值为61.3 nm,可有效提高碳化硅陶瓷材料的加工质量。【结论】本研究结果可为降低无压烧结碳化硅陶瓷材料表面粗糙度值提供参考。

[Objective]In order to reduce the surface roughness value of silicon carbide ceramic materials,an orthogonal grinding test was designed with the goal of optimizing the grinding process parameters.[Method]Firstly,the variance of the regression model was combined to analyze the influence of grinding wheel speed,feed rate and workpiece speed on the grinding quality;then,the response surface diagram was drawn to determine the influence of each parameter on the surface roughness.[Result]When the pressureless sintered silicon carbide ceramic material is removed by brittleness,the grinding wheel speed has the greatest influence on its surface roughness,and the larger the grinding wheel speed in a certain range,the smaller the surface roughness value;the calculation obtains the optimal combination of grinding parameters,being 42000 r/min for grinding wheel speed,1 mm/min for feed rate and 100 r/min for workpiece speed,where the surface roughness of silicon carbide ceramics can be 61.3 nm,which can effectively improve the processing quality of silicon carbide ceramics.[Conclusion]The results of this study can provide a reference for reducing the surface roughness of pressureless sintered silicon carbide ceramic materials.