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High temperature heat flux sensor with ITO/In_(2)O_(3)thermopile for extreme environment sensing

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摘要 Hypersonic vehicles and aircraft engine blades face complex and harsh environments such as high heat flow density and high temperature,and they are generally narrow curved spaces,making it impossible to actually install them for testing.Thin-film heat flux sensors(HFSs)have the advantages of small size,fast response,and in-situ fabrication,but they are prone to reach thermal equilibrium and thus fail during testing.In our manuscript,an ITO–In_(2)O_(3)thick film heat flux sensor(HFS)is designed,and a high-temperature heat flux test system is built to simulate the working condition of a blade subjected to heat flow impact.The simulation and test results show that the test performance of the thick-film HFS is improved by optimizing the structure and parameters.Under the condition of no water cooling,the designed HFS can realize short-time heat flux monitoring at 1450℃and long-term stable monitoring at 1300℃and below.With a maximum output thermopotential of 17.8 mV and an average test sensitivity of 0.035 mV/(kW/m^(2)),the designed HFS has superior high-temperature resistance that cannot be achieved by other existing thin(thick)film HFSs.Therefore,the designed HFS has great potential for application in harsh environments such as aerospace,weaponry,and industrial metallurgy.
出处 《Microsystems & Nanoengineering》 SCIE EI CSCD 2024年第4期163-174,共12页 微系统与纳米工程(英文)
基金 supported in part by the National Nature Science Foundation of China under Grant 52175525 in part by the National Key Research and Development Program of China under Grant 2020YFB2009100(104) in part by the Innovative Research Group Project of the National Natural Science Foundation of China under Grant 51821003 in part by the Fund for Shanxi‘1331 Project’Key Subject Construction.
关键词 FILM THICK EXTREME
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