Long wavelength infrared metalens fabricated by photolithography

光刻法制备的长波红外超透镜

Metasurfaces in the long wave infrared(LWIR)spectrum hold great potential for applications in ther-mal imaging,atmospheric remote sensing,and target identification,among others.In this study,we designed and experimentally demonstrated a 4 mm size,all-silicon metasurface metalens with large depth of focus opera-tional across a broadband range from 9µm to 11.5µm.The experimental results confirm effective focusing and imaging capabilities of the metalens in LWIR region,thus paving the way for practical LWIR applications of met-alens technology.

长波红外的超表面在热成像、大气遥感和目标识别等领域具有巨大的应用潜力。在这项研究中,我们设计并实验展示了一种4 mm尺寸的全硅超表面透镜,其具有大焦深,可在9µm至11.5µm范围内工作。实验结果证实了超透镜在长波红外区域的有效聚焦和成像能力,为超透镜技术在长波红外领域的实际应用铺平了道路。