腔体型超表面非制冷红外探测器

Cavity-type metasurface uncooled infrared detector

随着非制冷红外探测器像元尺寸的逐步缩小,提高探测器吸收率变得越来越重要。该文章基于现有的制备工艺,提出了一种IMIAM(Insulator-Metal-Insulator-Air-Metal)腔体型超表面非制冷红外探测器结构,在增强探测器吸收的同时有效改善了光敏层受热的均匀性。通过系统的仿真优化,其在长波红外波段(8~14μm)的平均吸收率超过了97%,使器件几乎实现了百分百的完美吸收,同时在中红外波段也表现出了优异的吸收特性。该文章还通过工艺验证了该结构的可靠性,对于改进现有非制冷红外探测器工艺具有一定的启示意义。

As the cell size of uncooled infrared(IR)detectors progressively shrinks,it becomes increasingly important to increase detector absorption.here,an IMIAM(Insulator-Metal-Insulator-Air-Metal)cavity type metasurface un-cooled IR detector structure is proposed,which effectively improves the uniformity of the photosensitive layer while en-hancing the absorption of the detector.Utilizing systematic simulation and optimization,it has achieved almost perfect absorption in the Long Wavelength Infrared range(8~14μm),meanwhile,it also shows excellent absorption perfor-mance in Mid Wavelength Infrared band.In this paper,the reliability of the structure is also verified by the process.this research may provide alternatives for optimizing conventional uncooled IR detectors.