Ti层厚度对TiN/Ti/TiON薄膜织物结构色颜色的影响

Influence of Ti layer thickness on the structural color of fabric with TiN/Ti/TiON film

采用磁控溅射技术,在涤纶织物基布上制备了TiN/Ti/TiON多层膜结构色。重点研究Ti层厚度对结构色膜层颜色的影响,通过膜厚仪,控制Ti膜层厚度,用光谱反射在线测色系统测量不同样品的L^(*)、a^(*)和b^(*)值,绘制L^(*)、a^(*)和b^(*)值颜色变化曲线。获得Ti层厚度对TiN/Ti/TiON结构色薄膜颜色的影响规律:在其他膜层工艺固定的情况下,Ti层厚度为0~416 nm时,颜色由浅黄色向蓝色转变,Ti层厚度大于416 nm时,颜色趋于稳定,一直为蓝色。

TiN/Ti/TiON multi-layered structural color was prepared on the polyester fabric by magnetron sputtering,and the influence of Ti layer thickness on the structural color was studied.The Ti layer thickness was controlled by film thickness monitor.Also the L^(*),a^(*)and b^(*)values of different samples were measured by spectral reflection online color measurement system,and the color change curves of L^(*),a^(*)and b^(*)values were drawn.The influence rule of Ti layer thickness on the color of TiN/Ti/TiON structure color film was ob⁃tained:under the condition that other film layers were fixed,when the thickness of Ti layer was 0~416 nm,the color changes from light yellow to blue,and when the thickness of Ti layer was greater than 416 nm,the color tended to be stable and remains blue.