高纯电子特气痕量杂质分析方法进展

Progress on Trace Impurity Analysis Methods for High-purity Electronic Special Gas

为保证高纯电子特气标准物质的质量,建立了痕量杂质的检测方法,对气体的研发、生产具有重要意义。高纯电子特气中的痕量杂质主要为痕量水、痕量氧、碳氧及碳氢化合物等,特殊杂质主要为氟化氢以及各种金属元素。针对不同痕量杂质的分析方法进行了论述,通过克服测量过程中的干扰因素可提高痕量杂质的测量准确性。

In order to ensure the quality of high-purity electronic special gas reference material,the detection method of trace impurities is established,which is of great significance to the research and development and production of gas.Trace impurities in high-purity electronic special gas are mainly trace water,trace oxygen,carbon oxygen and hydrocarbons,and special impurities are mainly hydrogen fluoride and various metal elements.The analysis methods of different trace impurities are discussed,the measurement accuracy of trace impurities can be improved by overcoming the interference factors in the measurement process,and the development prospect of analysis and detection technology is pointed out.