摘要
太赫兹测厚技术因其高精度和非接触性,已成为测量多涂层结构厚度的新途径。通过太赫兹时域光谱技术确定涂层厚度时,通常使用全局优化算法,并需要预先知道涂层的层数。然而在某些应用中,层数往往是未知的,这影响了太赫兹测厚技术的适用性和精度。通过优化支持向量机模型确定涂层层数,并比较不同改进分类算法的性能。确定层数后,利用Rouard模型对每层厚度进行全局拟合来确定涂层厚度,从而实现对未知层数的多涂层结构的分层厚度测量。在机械臂驱动的太赫兹时域光谱系统对曲面多涂层样品进行测厚的实验中验证了所提方法的可行性。
Objective Terahertz(THz)thickness measurement technology is widely recognized for its high precision and non-contact nature,making it a novel method for measuring the thicknesses of multi-layer structures.However,because the number of layers in some applications is often unknown,the accuracy and applicability of THz measurements are affected,and this poses a challenge to the technology’s further development.In many industrial scenarios,accurately determining the layer thickness is critical for quality control and material characterization.This study attempts to address this issue by optimizing a support vector machine(SVM)model to determine the number of layers and comparing the performances of different improved classification algorithms.The ultimate goal is to enhance the precision and applicability of THz thickness measurements in multi-layer structures with unknown layers,thereby improving the reliability of measurements in various industrial applications.Methods The proposed method used THz time-domain spectroscopy(THz-TDS)for thickness measurements.The kernel principal component analysis(KPCA)technique was first employed to extract THz spectral features.KPCA helped to reduce the dimensionality of the data while preserving the most informative features,thereby enhancing the performance of the classification model.Various advanced algorithms were then utilized to optimize the SVM for layer classification,including the grid search(GS),sparrow search algorithm(SSA),improved sparrow search algorithm(ISSA),and whale optimization algorithm(WOA).The optimal parameters for the SVM,including the penalty factor(C)and radial basis function(RBF)kernel parameter(g),were determined using these optimization techniques.The performances of these algorithms were then evaluated using five-fold cross-validation to ensure robustness and reliability.Following layer classification,the Rouard model was applied to globally fit each layer’s thickness.This model,coupled with the genetic algorithm for parameter optimization,enabled accurate thickness determination even when the number of layers was initially unknown.The genetic algorithm iteratively adjusted the model parameters to minimize the difference between the measured and calculated THz signals.The feasibility and effectiveness of the proposed method were validated through experiments on curved multilayer samples using a robotic arm-driven THz-TDS system.The THz-TDS system employed in experiments was shown to be capable of high-resolution measurements,covering a broad spectral range.The robotic-arm integration allowed for precise positioning and orientation of the THz probe,ensured accurate data collection from curved surfaces.This setup mimicked real-world industrial applications in which components often had complex geometries.Results and Discussions Experimental results demonstrate the effectiveness of the proposed method.The optimized KPCAISSA-SVM model achieves the highest classification accuracy,reaching 98.33%on the test set.This method significantly outperforms other optimization techniques in terms of convergence speed and prediction accuracy.The detailed experimental setup involves scanning single-,double-,and triple-layer paint samples on a curved surface,with the THz-TDS system capturing timedomain spectral data.The THz reflection data clearly depict the distinct characteristics of different layer structures.The layer thickness measurements using the Rouard model are highly accurate,with the first,second,and third layers of paint averaging(47.93±5.81)μm,(98.86±0.57)μm,and(57.20±0.79)μm,respectively.These measurements are consistent with the actual thickness values obtained using an eddy current thickness gauge.The KPCA-ISSA-SVM model also demonstrates robustness and efficiency in classifying the number of layers,which is crucial for subsequent thickness measurements.The improved classification and measurement accuracy underscore the potential of the proposed method in industrial applications in which precise and non-contact thickness measurements are required.The optimization of SVM parameters using advanced algorithms such as ISSA and WOA significantly improves the model’s ability to classify the number of layers accurately.The inclusion of KPCA for feature extraction from the THz spectral data enhances the model’s performance by reducing dimensionality and focusing on the most informative features.This combination of techniques results in a highly accurate and efficient classification model that can be applied to various industrial scenarios requiring precise layer thickness measurements.The experiment demonstrates the method’s capability in handling complex multi-layer structures on curved surfaces,which is a common challenge in practical applications.The robotic arm-driven THz-TDS system provides a versatile platform for accurate and repeatable measurements,further validating the method’s practicality and effectiveness.The system’s ability to adapt to different surface geometries and layer configurations highlights its potential for widespread industrial adoption.The study explores the effects of different optimization algorithms on the classification accuracy of the SVM model.The ISSA algorithm,with its adaptive parameter adjustment and dynamic population update strategies,shows superior performance in terms of convergence speed and accuracy.The WOA algorithm also demonstrates competitive results,although it is slightly less efficient than ISSA.Despite its accuracy,the traditional GS method is time-consuming and less practical for real-time applications.Conclusions This study presents a novel approach that uses an optimized SVM model to determine the number of layers in multilayer structures.By integrating KPCA for feature extraction and employing advanced optimization algorithms for SVM parameter tuning,the proposed method significantly improves classification accuracy and efficiency.Subsequent application of the Rouard model for thickness measurement further enhances the precision of THz thickness measurement technology.The experimental validation on curved multi-layer samples demonstrates the feasibility and effectiveness of this approach,providing a robust solution for real-time high-precision thickness measurements in industrial settings.Future work will explore the integration of additional features and further improvements in algorithmic efficiency to enhance realtime capabilities.The potential for applying this methodology to other non-destructive testing scenarios,such as the evaluation of composite materials and detection of defects in layered structures,will also be investigated.
作者
林杰
齐济
张宇奇
张为
陈雨昂
何明霞
曲秋红
张逸竹
Lin Jie;Qi Ji;Zhang Yuqi;Zhang Wei;Chen Yuang;He Mingxia;Qu Qiuhong;Zhang Yizhu(School of Precision Instrument and Opto-Electronics Engineering,Tianjin University,Tianjin 300072,China;Sichuan Innovation Research Institute of Tianjin University,Chengdu 610213,Sichuan,China;School of Electronics and Information Engineering,Tiangong University,Tianjin 300387,China)
出处
《中国激光》
EI
CAS
CSCD
北大核心
2024年第18期207-216,共10页
Chinese Journal of Lasers
基金
国家自然科学基金(12174284)
天津大学自主创新基金(2023XZH-009)。
关键词
太赫兹时域光谱技术
厚度测量
分类算法
多涂层结构
优化支持向量机
terahertz time-domain spectroscopy technology
thickness measurement
classification algorithm
multi-layer structure
optimized support vector machine