一种基于矩形同轴结构的微波大气压等离子体射流装置

A Microwave Atmospheric Pressure Plasma Jet Based on Rectangular Coaxial Structure

微波大气压等离子体射流具有密度大、电离度高及粒子活性强等优点,在材料处理和医疗等领域受到了广泛关注,但现有微波大气压等离子体射流源还存在射流及单次处理面积小、均匀性有限等问题。基于矩形同轴结构设计了一款工作在2.45 GHz的便携微波大气压等离子体射流源,优化设计了馈电点位置参数,分析了内外导体间隙对间隙电场强度的影响,探究了不同氩气气体流速对等离子体形貌的影响。研究结果表明,随气体流量增加等离子体形貌发生变化,在气流为40 L/min时产生宽约20 mm,长约3 mm的等离子体射流。该装置的提出一定程度上解决了工业应用中的等离子体源均匀性和处理面积不足的问题,也有助于大面积均匀等离子体的进一步深入研究。

Microwave atmospheric pressure plasma jet has the advantages of high density,high ionization degree and strong particle activity,which has received wide attention in the fields of material processing and medical treatment,etc.However,the existing microwave atmospheric pressure plasma jet source still have problems of small jet and single treatment area,and limited uniformity.A portable microwave atmospheric pressure plasma jet source operating at 2.45 GHz is designed based on rectangular coaxial structure,and the feed position parameters are optimized.The effects of the inner and outer conductor gaps on gap electric field strength are analyzed,and the effects of different argon gas flow rates on plasma morphology are investigated.The results show that the plasma morphology changes with the increase of gas flow rate,and a plasma jet with a width of about 20 mm and a length of about 3 mm is generated at a gas flow rate of 40 L/min.The proposed device solves the problems of plasma source uniformity and insufficient treatment area in industrial applications to some extent,and also contributes to further in-depth study of large-area uniform plasma.