特种气体瓶内壁高洁净研磨技术开发及应用

Development and Application of High Clean Grinding Technology on Inner Wall of Special Gas Cylinder

采用电化学机械研磨技术及钢瓶自转和公转的研磨方式,然后通过内部抛丸除锈、高压水清洗、内壁研磨、第三次清洗、去离子化处理和高度真空及置换等主要关键工序,研制出容积为30~50L、达到气瓶内壁Ra≤0.3μm的Rmax1S标准的充装7N高纯电子气体的高洁净研磨气瓶,并且处理后的水份含量小于0.5PPM,油分含量小于25mg/m^(2),钢瓶内壁研磨均匀,研磨周期短。

Using electrochemical mechanical grinding technology and cylinder rotation and revolution grinding methods,and then through the internal shot blasting rust,high pressure water cleaning,inner wall grinding,third cleaning,deionization treatment and high vacuum and displacement and other key processes,A high clean grinding cylinder filled with 7N high purity electronic gas with a volume of 30~50L,meeting the Rmax1S standard of Ra≤0.3μm on the inner wall of the cylinder,and the treated water content is less than 0.5PPM,the oil content is less than 25mg/m 2,the inner wall of the cylinder is uniform,and the grinding cycle is short.