摘要
阐述基于微电子学科的洁净实验室特点,以安全为导向,分析物理气相沉积工艺特点、设备结构、重要参数,给出该设备的安全管理措施,以提升微电子实验室的安全防范能力和风险治理效果。
This paper describes the characteristics of clean laboratories based on microelectronics,with a focus on safety.It analyzes the characteristics of physical vapor deposition processes,equipment structures,and important parameters,and provides safety management measures for the equipment to enhance the safety prevention capabilities and risk management effectiveness of microelectronics laboratories.
作者
张晓欣
何翔欣
ZHANG Xiaoxin;HE Xiangxin(Shanghai University,Shanghai 200444,China)
出处
《电子技术（上海）》
2024年第8期7-9,共3页
Electronic Technology
关键词
物理气相沉积
设备安全
管理模式
蒸镀
磁控溅射
physical vapor deposition(PVD)
equipment safety
management model
evaporation
sputtering
