一种宽带低损耗微同轴功分器

A broadband low insertion loss micro-coaxial Wilkinson divider

为了降低功分器的插损、提高功分端口之间的隔离度,对传统威尔金森功分器进行改进,用矩形微同轴结构代替微带线结构,设计了一种新型功分器。微同轴基于微机电系统(MEMS)工艺,主要由改进的五层电镀铜层构成,通过调整内导体的宽度可获得10~100Ω变化范围的特性阻抗,进一步扩大了多阶阻抗变换的阻抗设计范围。功分器三个端口设计为共面波导(CPW)结构,适用于G-S-G探针测试及金丝互连。功分器参数的初始值由数值计算得到,并在三维电磁仿真软件HFSS中建模、仿真和优化。最后,对功分器进行了加工和测试。功分器的尺寸为13.2 mm×6.3 mm×0.5 mm,在12~18 GHz带宽内功分损耗小于3.3 dB,隔离度大于25 dB,表明该新型功分器具有宽频带、低损耗、高隔离性能。

To reduce insertion loss and enhance port isolation,a novel power divider was designed based on traditional Wilkinson dividers with rectangular micro-coaxial structures instead of microstrip structures.The micro-coaxial structure,crafted using microelectromechanical systems(MEMS)technology,primarily comprises improved five-layer copper plating.By adjusting the width of the inner conductor,a characteristic impedance ranging from 10Ωto 100Ωcan be achieved,further expanding the impedance range for multi-stage impedance transformations.A three-port power divider was designed with coplanar waveguide(CPW)structures,which is suitable for G-S-G probe testing and external gold wires interconnection.The initial values for the power divider′s parameters were determined through numerical calculations,which was subsequently modeled,simulated,and optimized using three-dimensional electromagnetic simulation software HFSS.Finally,the power divider was then processed and tested.The power divider,with a size of 13.2 mm×6.3 mm×0.5 mm,exhibits a power division loss of less than 3.3 dB and an isolation of greater than 25 dB from 12 GHz to 18 GHz,demonstrating its broadband,low-loss,and high isolation capabilities.