用于甚低频水声信号检测的电化学敏感单元设计

针对深海环境下对72 Hz以下甚低频水声信号的感知和探测需求,该文研制一种基于电化学换能原理和MEMS技术的电化学敏感单元。该电化学敏感单元包括MEMS敏感电极、有机玻璃制作的电化学反应腔、胶膜和电解质溶液等。采用MEMS技术和Pt-Pt倒装键合技术在单晶硅衬底上完成MEMS敏感电极的加工和制作,采用螺纹紧固的方法完成电化学敏感单元的装配。最后,将电化学敏感单元通过声学灌封制备得到电化学矢量水声传感器样机,并随电化学矢量传感器样机进行测试,测试结果表明,这种电化学敏感单元可用于对72 Hz以下甚低频水声信号的检测。

In order to meet the needs of sensing and detecting very low frequency underwater acoustic signals below 72 Hz in the deep sea environment,an electrochemical sensing unit based on the principle of electrochemical transducer and MEMS technology is developed in this paper.The electrochemical sensing unit includes MEMS sensing electrodes,electrochemical reaction chambers made of plexiglass,glue films,electrolyte solutions,etc.MEMS technology and Pt-Pt flip-chip bonding technology are used to complete the processing and fabrication of MEMS sensitive electrodes on monocrystalline silicon substrates,and the assembly of electrochemical sensitive units is completed by thread fastening.Finally,the electrochemical sensing unit was prepared by acoustically encapsulating to obtain an electrochemical vector underwater acoustic sensor prototype,and was tested with the electrochemical vector sensor prototype.The test results show that the electrochemical sensing unit can be used to detect very low frequency underwater acoustic signals below 72 Hz.