摘要
This paper presents the design,fabrication,packaging,and characterization of a high-performance CMUT array.The array,which features rectangular cells fabricated using a sacrificial release process,achieves a receiving sensitivity of-231.44 d B(re:1 V/μPa)with a 40 d B gain.Notably,the CMUT array exhibits a minimal sensitivity variation of just 0.87 d B across a temperature range of 0 to 60°C.Furthermore,the output voltage non-linearity at 1 k Hz is approximately 0.44%.These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial transducers.The high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications.
基金
supported in part by the National Natural Science Foundation of China under Grant 61927807,62320106011,and 62304208
China Postdoctoral Science Foundation under Grant 2023M733277 and2024T170848。
