压电MEMS振动传感器信号采集系统设计与实现

Design and Implementation of Piezoelectric MEMS Vibration Sensor Signal Acquisition System

针对硅基铌酸锂单晶薄膜压电MEMS振动传感器产生振动信号的特征,设计了基于FPGA平台的数据采集系统。该系统采用AD7606采样芯片,结合状态机的思想,完成了AD采样设计的时序图,实现了数据转换,转换后的数据使用FIFO进行存储,之后通过USB 2.0传输到上位机进行处理。最后搭建了实物验证平台,利用此系统采集振动台输出的振动信号,并用MATLAB对采集到的振动信号进行分析。实验结果表明,当加载加速度为3~20 g时,采集到的电荷与输入加速度之间有较好的线性度。该采样系统能够满足一定的采样速率要求,在压电MEMS振动传感器信号采集领域有广阔的应用前景。

A data acquisition system based on FPGA is designed for the characteristics of vibration signal generated by piezoelectric MEMS vibration sensor of silicon-based lithium niobate single crystal.The system uses an AD7606 sampling chip combined with the idea of the state machine to complete the timing diagram of the AD sampling design and realize the data conversion.The converted data is stored by FIFO and then transmitted to the host computer through USB 2.0 for processing.Finally,the physical verification platform is built,the vibration signal output of the vibration table is collected by this system,and the vibration signal is analyzed by MATLAB.The experimental results show that there is a good linearity between the collected charge and the input acceleration when the loading acceleration is 3~20 g.The sampling system designed in this paper can meet the requirement of a certain sampling rate and has a broad application prospect in the field of piezoelectric MEMS vibration sensor signal acquisition.