摘要
设计了一种基于压电双晶梁的L型压电驱动器,基于模块化设计思想将L型压电驱动器应用于压电移动机器人的研制。压电移动机器人由4个周向分布的L型压电驱动器和连接平台组成,结构简单紧凑,可实现2自由度平面内大范围高精运动。对压电移动机器人进行加工和装配,并搭建测试平台对压电移动机器人的运动输出特性进行实验研究。测试结果表明,压电移动机器人具有兼顾高精度、快速度、高稳定性和强承载能力的良好综合性能,其运动分辨率为1μm,最大运动速度可达46 mm/s,承载能力可达75 g,在微纳操作、晶圆缺陷检测和超精密加工领域具有广阔的应用前景。
In this study,based on the modular design concept,an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot.The mobile robot is composed of four circumferentially distributed L-type piezoelectric actuators and connecting platforms.This contribution representsa simple and compact structuredesigned to achieve a significant range of high-precision motion in a 2-DOF plane.The mobile robot was processed and assembled,and a test platform was developed to investigate its motion outputcharacteristics.Experimental results demonstratedthat the proposed mobile robot showed a good comprehensive performance including high precision,speed,and stability,and strong carrying capacity.Its motion resolution,maximum motion speed,and carrying capacitywere 1μm,46 mm/s,and 75 g,respectively.Finally,the proposed mobile robot has broad application prospects in terms of micro and nano operations,wafer defect detection,and ultra-precision machining.
作者
李运菲
祝锡晶
李婧
高国栋
LI Yunfei;ZHU Xijing;LI Jing;GAO Guodong(Shanxi Key Laboratory of Advanced Manufacturing Technology,North University of China,Taiyuan 030051,China)
出处
《压电与声光》
CAS
北大核心
2024年第5期741-746,754,共7页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金(51975540)
先进制造技术山西省重点实验室(中北大学)2022年度开放基金(XJZZ202202)
山西省基础研究计划项目(202203021222041)。
关键词
惯性致动
微型机器人
压电驱动器
模块化设计
运动特性
inertia actuation
microrobots
piezoelectric actuator
modular design
motion characteristics.