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镍基合金上FeCrAl薄膜应变计的制备与性能

Preparation and Properties of FeCrAl Thin Film Strain Gauge on Nickel-based Alloy
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摘要 薄膜应变计是航空发动机涡轮叶片应变测量的可靠选择。本文以FeCrAl合金为敏感材料,在镍基合金DD6上制备了多层薄膜材料体系的FeCrAl薄膜应变计,并测试了不同温度环境下应变计的应变性能。结果表明,20℃,200℃,400℃和600℃时的应变灵敏系数为2.41,2.68,3.16和3.70;200℃,400℃和600℃的电阻温度系数为567.5ppm/℃,534.1ppm/℃,517.3ppm/℃,电阻漂移率为0.00118h^(-1),0.00167h^(-1),0.00181h^(-1)。 Thin film strain gauge is a reliable choice for strain measurement of aeroengine turbine blades.The FeCrAl thin film strain gauge was prepared on nickel-based alloy DD6 with FeCrAl alloy as the sensitive material,and the strain performance of strain gauge was tested at different temperatures.The results show that the gauge factors at 20℃,200℃,400℃and 600℃are 2.41,2.68,3.16 and 3.70.The temperature coefficients of resistance at 200℃,400℃and 600℃are 567.5,534.1 and 517.3ppm/℃,and the drift rate is 0.00118h^(-1),0.00167h^(-1),0.00181h^(-1).
作者 陈长源 周世威 周枳仲 蒋书文 Chen Changyuan;Zhou Shiwei;Zhou Zhizhong;Jiang Shuwen*(State Key Laboratory of Electronic Thin Films and Integrated Devices,School of integrated Circuit Science and Engineering,University of Electronic Science and Technology of China,Chengdu Sichuan 611731)
出处 《中国仪器仪表》 2024年第11期69-73,共5页 China Instrumentation
基金 国家重点研发计划(2021YFB3801700) 航空科学基金(20200046080001)。
关键词 薄膜应变计 FeCrAl合金 应变灵敏系数 电阻温度系数 电阻漂移率 Thin film strain gauge FeCrAl alloy Gauge facto Temperature coefficient of resistance Drift rate
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