钯薄膜光纤光栅氢气传感器的研究

Research on Hydrogen Sensor Based on Palladium Thin Film Fiber Grating

在长距离管道输氢过程中,氢泄漏的精确本安监测是氢能安全输送的关键。基于光纤布拉格光栅(FBG)传感技术,采用磁控溅射方法溅射钯金属氢敏薄膜,实现了氢泄漏传感器的制备。在此基础上,首先开展光纤光栅腐蚀前、后光栅波长漂移对照实验,结果表明:腐蚀后的光纤光栅可以显著提高传感器的灵敏度;然后研究了氢浓度在0%~5%时,不同薄膜厚度对FBG氢气传感器波长漂移量的影响规律;最后开展了不同氢浓度下的FBG氢气传感器响应重复性实验及温度补偿实验,结果显示该传感器能够有效、准确地进行氢浓度测量,灵敏度达到12.20 pm/%,且重复性良好。

The accurate intrinsic safety monitoring of hydrogen leakage means key to safe hydrogen energy transportation in long distance pipeline.In this paper,based on the fiber Bragg grating(FBG) sensing technology,having magnetron sputtering method adopted to spurt palladium metal hydrogen sensitive film so as to produce hydrogen leakage sensor was implemented,including a control experiment on grating wavelength drift before and after fiber grating corrosion.The results show that,the sensor's sensitivity can be significantly improved by the fiber grating corroded.In addition,the thin film thickness' effect on wavelength drift of FBG hydrogen sensor was investigated when hydrogen concentration ranges from 0% to 5%.Experiments on both response repeatability and temperature compensation of the FBG hydrogen sensor under different hydrogen concentration show that,the sensor has good repeatability and can effectively and accurately measure the hydrogen concentration with a sensitivity of 12.20 pm/% and better repeatability.